Surprisingly strong and deformable silicon -- K Trade Fair

Surprisingly strong and deformable silicon

Ten-year effort

The production process for strong, deformable silicon pillars (links). The pillars are first etched through a resist, then oxidized and finally cleaned. On the right, the end result can be seen (electron microscope image). Illustration: ETH Zurich

Lithography with final cleaning

Striking results

Applications in smartphones

Reference