FLAT HEATING ELEMENTS
Flat heating elements made of silicon nitride are normally rectangular. Various measurements and batch sizes up to our mold diameter of 300 mm can be produced. The special properties and the low mass of ceramic allow fast heating rates, a uniform temperature distribution and high control accuracy. Small heating elements can be operated with very high surface power at short cycle times. In comparison to metallic heaters the surface of ceramic stays very smooth due to its low thermal expansion even when operated with changes in temperature. The high strength of hot-pressed silicon nitride guarantees high stress resistance (e.g. with high pressure loads) and excellent wear resistance. We provide flat heating elements for operating in the air at temperatures up to 500 C°. Temperatures up to 1000 C° (if required) could be achieved by developing specific technical solutions.
Our in-house designs make any modification in size, configuration, or performance simple and convenient. Mounting-bracket holes and bores for temperature sensors can be included. Laser-cut vacuum grooves can be added as well. Our flat heating elements come already flat ground, however they can be ground further up to a flatness of < 10 μm to meet specific requirements. A variety of shapes formed to the contour of the product or tool to be heated are possible as well. Furthermore, our ceramic heating conductor with its customized design allows the integration of several heating zones. Devices to compensate for heat loss and an internal RTD for temperature measurement can be easily built in.
Areas of application
semiconductor processing systems (e.g. die bonders)
coating systems, evaporators
R&D – laboratory equipment, measuring and testing equipment, reactors